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Session 1 - Contamination Free Manufacturing (CFM)
14.2 Inline Electrical Yield versus Optical Inspection: Correlations, Connections and Disconnections
- Fan Zheng, GLOBALFOUNDRIES ;
- Dave Salvador, GLOBALFOUNDRIES ;
- Cathy Gow, GLOBALFOUNDRIES ;
- Lori Kermel, GLOBALFOUNDRIES ;
- Bryan Rhoads, GLOBALFOUNDRIES ;
- Kan Zhang, GLOBALFOUNDRIES ;
- Xiao Pan, GLOBALFOUNDRIES ;
- Ben Stahl, GLOBALFOUNDRIES ;
- William Davies, GLOBALFOUNDRIES ;
- Amanda Tessier, GLOBALFOUNDRIES ;
- Edward Crawford, GLOBALFOUNDRIES ;
- Rebekah Sheraw, GLOBALFOUNDRIES ;
- Ishtiaq Ahsan, GLOBALFOUNDRIES ;
- Brett Engel, GLOBALFOUNDRIES ;
- Brad Austin, IBM Corporation ;
- Yongchun Xin, IBM Corporation ;
- Jan Sim, IBM Corporation
Inline Electrical Yield versus Optical Inspection: Correlations, Connections and Disconnections